JPH0639335Y2 - 加速度センサ - Google Patents

加速度センサ

Info

Publication number
JPH0639335Y2
JPH0639335Y2 JP1988034128U JP3412888U JPH0639335Y2 JP H0639335 Y2 JPH0639335 Y2 JP H0639335Y2 JP 1988034128 U JP1988034128 U JP 1988034128U JP 3412888 U JP3412888 U JP 3412888U JP H0639335 Y2 JPH0639335 Y2 JP H0639335Y2
Authority
JP
Japan
Prior art keywords
acceleration sensor
piezoelectric element
heat
acceleration
conductive resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988034128U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01137474U (en]
Inventor
知伸 冨田
壯征 佐藤
Original Assignee
三菱油化株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱油化株式会社 filed Critical 三菱油化株式会社
Priority to JP1988034128U priority Critical patent/JPH0639335Y2/ja
Publication of JPH01137474U publication Critical patent/JPH01137474U/ja
Application granted granted Critical
Publication of JPH0639335Y2 publication Critical patent/JPH0639335Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Micromachines (AREA)
JP1988034128U 1988-03-14 1988-03-14 加速度センサ Expired - Lifetime JPH0639335Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988034128U JPH0639335Y2 (ja) 1988-03-14 1988-03-14 加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988034128U JPH0639335Y2 (ja) 1988-03-14 1988-03-14 加速度センサ

Publications (2)

Publication Number Publication Date
JPH01137474U JPH01137474U (en]) 1989-09-20
JPH0639335Y2 true JPH0639335Y2 (ja) 1994-10-12

Family

ID=31260847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988034128U Expired - Lifetime JPH0639335Y2 (ja) 1988-03-14 1988-03-14 加速度センサ

Country Status (1)

Country Link
JP (1) JPH0639335Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5982889B2 (ja) * 2012-03-12 2016-08-31 セイコーエプソン株式会社 物理量センサーモジュール及び電子機器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548311B2 (en]) * 1974-04-18 1979-04-14
JPS61181319U (en]) * 1985-05-02 1986-11-12

Also Published As

Publication number Publication date
JPH01137474U (en]) 1989-09-20

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